弹性波放大与滤波的声子梯度元mems

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2023-10-12 DOI:10.1109/JMEMS.2023.3320198

Federico Maspero;Jacopo Maria De Ponti;Luca Iorio;Annachiara Esposito;Riccardo Bertacco;Andrea di Matteo;Alberto Corigliano;Raffaele Ardito

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引用次数: 0

摘要

受最近的梯度超材料设计的启发，我们创建了用于频率信号放大和波滤波的微谐振器声子阵列。利用厚硅衬底上的悬浮波导，我们杂交表面瑞利和兰姆弯曲波，以有效地实现沿预定义通道的声子信号控制。然后使用适当分级的微谐振器对导波进行空间控制，从而提供高信噪比，同时产生声子延迟线。该装置可用于传感、波滤波或能量收集。(2023 - 0117)

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Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering

Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting. [2023-0117]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.