用于实现柔性电子电路和系统的低温金属氧化物薄膜晶体管技术

IF 4.8 4区 物理与天体物理 Q2 PHYSICS, CONDENSED MATTER
Runxiao Shi, Tengteng Lei, Zhihe Xia, Man Wong
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引用次数: 1

摘要

本文综述了两种用于实现柔性电子电路和系统的300°C金属氧化物(MO)薄膜晶体管(TFT)技术。用于抑制导通电压(V ON)变化和移位的氟化增强tft,以及用于获取传感器信号和调制V ON的双栅极tft已被部署,以提高其部署的系统的鲁棒性和性能。基于氟化TFT的数字电路构建模块已经被设计、制造和表征,这证明了所提出的低温TFT技术在实现柔性电子系统中的实用性。最近报道了用于采集生物电位信号的模拟前端系统和用于采集触觉图像的有源矩阵传感器阵列的构建和表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low-temperature metal–oxide thin-film transistor technologies for implementing flexible electronic circuits and systems
Abstract Here we review two 300 °C metal–oxide (MO) thin-film transistor (TFT) technologies for the implementation of flexible electronic circuits and systems. Fluorination-enhanced TFTs for suppressing the variation and shift of turn-on voltage ( V ON ), and dual-gate TFTs for acquiring sensor signals and modulating V ON have been deployed to improve the robustness and performance of the systems in which they are deployed. Digital circuit building blocks based on fluorinated TFTs have been designed, fabricated, and characterized, which demonstrate the utility of the proposed low-temperature TFT technologies for implementing flexible electronic systems. The construction and characterization of an analog front-end system for the acquisition of bio-potential signals and an active-matrix sensor array for the acquisition of tactile images have been reported recently.
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来源期刊
Journal of Semiconductors
Journal of Semiconductors PHYSICS, CONDENSED MATTER-
CiteScore
6.70
自引率
9.80%
发文量
119
期刊介绍: Journal of Semiconductors publishes articles that emphasize semiconductor physics, materials, devices, circuits, and related technology.
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