用于飞秒激光烧蚀形貌原位测量的超分辨率三维结构照明轮廓术

IF 5.4 1区物理与天体物理 Q1 OPTICS

APL Photonics Pub Date : 2023-10-01 DOI:10.1063/5.0165363

Jielei Ni, Qianyi Wei, Yuquan Zhang, Jie Xu, Xi Xie, Yixuan Chen, Yanan Fu, Gengwei Cao, Xiaocong Yuan, Changjun Min

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引用次数: 0

摘要

飞秒激光烧蚀在纳米电子学和纳米光子学器件的表面结构中有着广泛的应用。传统上，在加工完成后，使用扫描电子显微镜或原子力显微镜以非原位方式对制造的三维(3D)形貌进行检查。为了快速监测和有效优化表面制造质量，我们开发了一种原位方法来精确重建表面微结构的三维形态。这种方法是基于三角光学系统，利用结构化照明。该方法提供了超分辨率能力，使其成为一种强大的非侵入性工具，用于快速原位监测表面烧蚀结构。

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Super-resolution three-dimensional structured illumination profilometry for in situ measurement of femtosecond laser ablation morphology

Femtosecond laser ablation has found wide-ranging applications in the surface structuring of nanoelectronics and nanophotonics devices. Traditionally, the inspection of the fabricated three-dimensional (3D) morphology was performed using a scanning electron microscope or atomic force microscopy in an ex situ manner after processing was complete. To quickly monitor and efficiently optimize the quality of surface fabrication, we developed an in situ method to accurately reconstruct the 3D morphology of surface micro-structures. This method is based on a triangulation optical system that utilizes structured illumination. The approach offers a super-resolution capacity, making it a powerful and non-invasive tool for quick in situ monitoring of surface ablation structures.

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来源期刊

APL Photonics Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

10.30

自引率

3.60%

发文量

107

审稿时长

19 weeks

期刊介绍： APL Photonics is the new dedicated home for open access multidisciplinary research from and for the photonics community. The journal publishes fundamental and applied results that significantly advance the knowledge in photonics across physics, chemistry, biology and materials science.