通过自扩散放热反应与钎焊合金作为高温互连填料进行连接

Canyu Liu, Zhaoxia Zhou, Changqing Liu
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引用次数: 0

摘要

由于在高温下工作的电子器件的需求不断增加,人们对包括SiC和GaN在内的宽带隙(WBG)半导体越来越感兴趣。然而,为了最大限度地发挥WBG器件的潜在容量,新的高温互连材料和工艺是必不可少的,因为目前为Si器件开发的现有锡基焊料合金和键合工艺无法满足可靠性要求。在本研究中,采用熔点在600℃以上的Cu-15Ag-5P和Incusil (Ag-27.25Cu-12.5In-1.25Ti)反应钎焊合金作为互连材料,在高温下具有优异的性能。采用自传播放热反应(SPER),通过在毫秒尺度上的强烈快速局部加热和冷却进行键合过程。在SPER的帮助下,将纳米箔作为外部热源从堆叠结构的外部施加,在环境气氛中不使用助熔剂进行键合过程,建立了Cu/Cu- 15ag - 5p /Cu和Cu/Incusil/Cu夹层键合结构。结果表明,Cu-15Ag-P合金中的P元素具有自通量效应,有利于超快速界面反应过程的进行。将纳米箔放置在两层钎焊合金之间的堆叠结构中,实验结果表明纳米箔与钎焊合金之间的界面微观结构结合良好。本文还讨论了sper辅助钎焊合金键合的实用性和工业应用前景,并将其作为高温大功率电子封装的一种潜在可行的组装路线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bonding with brazing alloys as high-temperature interconnection filler through self-propagating exothermic reaction
There has been growing interest in wide bandgap (WBG) semiconductors including SiC and GaN due to the increasing demands for electronic devices serving at high temperatures. However, to maximise the potential capacity of WBG devices, new high-temperature interconnection materials and processes are indispensable as the current existing Sn-based solder alloys and bonding processes developed for Si devices are unable to meet the reliability requirements. In the present work, reactive brazing alloys including Cu-15Ag-5P and Incusil (Ag-27.25Cu-12.5In-1.25Ti) with melting points above 600°C have been utilized as the interconnection materials which offer excellent properties under high operation temperature. The self-propagating exothermic reaction (SPER) was applied for the bonding process via an intense rapid local heating and cooling at a millisecond scale. The strong Cu/Cu-15Ag-5P/Cu and Cu/Incusil/Cu sandwich bonded structures have been created with the assistance of SPER, where the nanofoil was applied from the outside of stacked structures as an external heat source and the bonding process was conducted in the ambient atmosphere without using flux. It has been found that the P element in Cu-15Ag-P alloy has the self-flux effect, which is beneficial for the ultra-fast interfacial reaction process. The experiments where the nanofoil was placed inside of stacked structures between two sheets of brazing alloys have also been conducted, which exhibited the well-bonded interface microstructures between nanofoil and brazing alloys. The outlook on the design for practicality and industrial uses for SPER-assisted bonding with brazing alloys has also been discussed, as a potential viable assembly route for the high-temperature and high-power electronics packaging.
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