Abdurrahman Muhammed, Nura Liman Chiromawa, Ibrahim Muhammad Bagudo, Abdurrahman Ibrahim Khalil
{"title":"用H2SO4溶液织构硅片增强红外光吸收","authors":"Abdurrahman Muhammed, Nura Liman Chiromawa, Ibrahim Muhammad Bagudo, Abdurrahman Ibrahim Khalil","doi":"10.56919/usci.2123.014","DOIUrl":null,"url":null,"abstract":"In recent years, the formation of microstructures on silicon wafer has gained popularity as a concept for increasing photon trapping and light absorption for optoelectronics applications. This study used three methods to improve infrared light absorption in silicon samples - sample preparation, Radio Corporation of America (RCA) cleaning, and chemical wet etching. The solutions used for Radio Corporation of America (RCA) clean were water (H2O), Ammonium hydroxide (NH4OH), hydrogen perioxide (H2O2), Hydrofluoric acid (H.F.). Three silicon wafers with a 1cm2 orientation were cut and cleaned using RCA, and then surface-textured using a wet chemical procedure by etching into different chemical solutions of Sulfuric acid (H2SO4) of the same concentration. The wafers were removed at different etching time intervals (5, 10, 15 minutes) and analysed using an infrared spectrometer with Fourier transformation (FTIR) to study the absorptions of light. A mean absorbance of 0.9801 a.u, 0.9845 a.u and 0.977 a.u for 5, 10 and 15 minutes of texturization was obtained. The results showed a wafer that was etched by H2SO4 solution for 10 minute as the most enhanced silicon wafer for I.R light absorption. Hence, it is recommended to texture a silicon wafer for a period of 10 minutes in H2SO4 solution for better absorption.","PeriodicalId":235595,"journal":{"name":"UMYU Scientifica","volume":"169 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Infrared Light Absorption Enhancement in Crystalline Silicon Wafer Textured With H2SO4 Solution\",\"authors\":\"Abdurrahman Muhammed, Nura Liman Chiromawa, Ibrahim Muhammad Bagudo, Abdurrahman Ibrahim Khalil\",\"doi\":\"10.56919/usci.2123.014\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In recent years, the formation of microstructures on silicon wafer has gained popularity as a concept for increasing photon trapping and light absorption for optoelectronics applications. This study used three methods to improve infrared light absorption in silicon samples - sample preparation, Radio Corporation of America (RCA) cleaning, and chemical wet etching. The solutions used for Radio Corporation of America (RCA) clean were water (H2O), Ammonium hydroxide (NH4OH), hydrogen perioxide (H2O2), Hydrofluoric acid (H.F.). Three silicon wafers with a 1cm2 orientation were cut and cleaned using RCA, and then surface-textured using a wet chemical procedure by etching into different chemical solutions of Sulfuric acid (H2SO4) of the same concentration. The wafers were removed at different etching time intervals (5, 10, 15 minutes) and analysed using an infrared spectrometer with Fourier transformation (FTIR) to study the absorptions of light. A mean absorbance of 0.9801 a.u, 0.9845 a.u and 0.977 a.u for 5, 10 and 15 minutes of texturization was obtained. The results showed a wafer that was etched by H2SO4 solution for 10 minute as the most enhanced silicon wafer for I.R light absorption. Hence, it is recommended to texture a silicon wafer for a period of 10 minutes in H2SO4 solution for better absorption.\",\"PeriodicalId\":235595,\"journal\":{\"name\":\"UMYU Scientifica\",\"volume\":\"169 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"UMYU Scientifica\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.56919/usci.2123.014\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"UMYU Scientifica","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.56919/usci.2123.014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
近年来,在硅片上形成微结构作为一个增加光子捕获和光吸收的概念在光电子应用中得到了广泛的应用。本研究采用三种方法来提高硅样品的红外光吸收——样品制备、美国无线电公司(RCA)清洗和化学湿法蚀刻。美国无线电公司(Radio Corporation of America, RCA)使用的清洁溶液有水(H2O)、氢氧化铵(NH4OH)、过氧化氢(H2O2)、氢氟酸(H.F.)。采用RCA法对3片1cm2取向的硅片进行切割和清洗,然后在相同浓度的硫酸(H2SO4)的不同化学溶液中蚀刻,采用湿化学工艺对硅片进行表面纹理处理。在不同的蚀刻时间间隔(5,10,15分钟)去除晶圆,并使用傅里叶变换红外光谱仪(FTIR)分析光的吸收。织构作用5、10和15分钟的平均吸光度分别为0.9801、0.9845和0.977 a.u。结果表明,在H2SO4溶液中蚀刻10分钟后,硅片对ir光的吸收增强最大。因此,建议将硅片在H2SO4溶液中织制10分钟,以获得更好的吸收。
Infrared Light Absorption Enhancement in Crystalline Silicon Wafer Textured With H2SO4 Solution
In recent years, the formation of microstructures on silicon wafer has gained popularity as a concept for increasing photon trapping and light absorption for optoelectronics applications. This study used three methods to improve infrared light absorption in silicon samples - sample preparation, Radio Corporation of America (RCA) cleaning, and chemical wet etching. The solutions used for Radio Corporation of America (RCA) clean were water (H2O), Ammonium hydroxide (NH4OH), hydrogen perioxide (H2O2), Hydrofluoric acid (H.F.). Three silicon wafers with a 1cm2 orientation were cut and cleaned using RCA, and then surface-textured using a wet chemical procedure by etching into different chemical solutions of Sulfuric acid (H2SO4) of the same concentration. The wafers were removed at different etching time intervals (5, 10, 15 minutes) and analysed using an infrared spectrometer with Fourier transformation (FTIR) to study the absorptions of light. A mean absorbance of 0.9801 a.u, 0.9845 a.u and 0.977 a.u for 5, 10 and 15 minutes of texturization was obtained. The results showed a wafer that was etched by H2SO4 solution for 10 minute as the most enhanced silicon wafer for I.R light absorption. Hence, it is recommended to texture a silicon wafer for a period of 10 minutes in H2SO4 solution for better absorption.