电子应用中GaOOH掺杂的理论研究

Masaya Ichimura
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引用次数: 0

摘要

GaOOH的带隙为4.7 ~ 4.9 eV,可视为几种超宽带隙(UWBG)半导体之一,但目前主要用作Ga2O3的前驱体材料。为了研究价控制的可能性及其在电子学中的应用,利用第一性原理密度泛函理论计算研究了高ooh中的杂质能级。计算了含杂质原子的超级单体状态的密度值。根据结果,在14族元素中,Si有望引入一个浅层供体能级,即引入一个自由电子。另一方面,Ge和Sn在导带边缘下引入了约0.7 eV的局域态,因此不能作为有效的供体。Mg和Ca可以引入自由空穴并作为浅受体,而Zn和Cd可以引入远离价带的受体能级。过渡金属元素(Fe, Co, Ni, Cu)也被考虑过,但它们都不能作为浅掺杂剂。因此,结果表明,如果用Si掺杂n型,用Mg和Ca掺杂p型,则可以控制载流子浓度。由于高ooh可以在低温下使用各种化学技术轻松沉积,因此高ooh将潜在地用于透明电子设备。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Theoretical Study of Doping in GaOOH for Electronics Applications
GaOOH, having a bandgap of 4.7–4.9 eV, can be regarded as one of several ultrawide-bandgap (UWBG) semiconductors, although it has so far mainly been used as a precursor material of Ga2O3. To examine the possibility of valence control and application in electronics, impurity levels in GaOOH are investigated using the first-principles density-functional theory calculation. The density values of the states of a supercell including an impurity atom are calculated. According to the results, among the group 14 elements, Si is expected to introduce a shallow donor level, i.e., a free electron is introduced. On the other hand, Ge and Sn introduce a localized state about 0.7 eV below the conduction band edge, and thus cannot act as an effective donor. While Mg and Ca can introduce a free hole and act as a shallow acceptor, Zn and Cd introduce acceptor levels away from the valence band. The transition metal elements (Fe, Co, Ni, Cu) are also considered, but none of them are expected to act as a shallow dopant. Thus, the results suggest that the carrier concentration can be controlled if Si is used for n-type doping, and Mg and Ca for p-type doping. Since GaOOH can be easily deposited using various chemical techniques at low temperatures, GaOOH will potentially be useful for transparent electronic devices.
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