脉冲直流磁控溅射在PET薄膜上沉积金

Thi Thanh Lan Nguyen, Hong Tuan Pham, Thanh Hop Nguyen
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引用次数: 0

摘要

采用脉冲直流磁控溅射技术在聚对苯二甲酸乙二醇酯(PET)薄膜上沉积金。利用Jasco V-770/SLM-907分光光度计测量了金涂层的反射率和透射率,从而评价了金涂层的光学性能。光谱分析提供有关颜色、杂质、表面质量和涂层厚度的信息。在圆形靶材的溅射实验中,金涂层在靶材对面区域呈现出相对均匀的颜色,厚度(df)大于60 nm,电阻小于6 Ω。涂层厚度从中心逐渐减小,从而影响其他物理性能,因此在大型基材上涂层时应考虑并用于计算。制造的金涂层通过了附着力、耐摩擦性和耐清洗剂的测试,使其适用于工业和日常应用,如装饰或制造生物传感器和电子元件的电极。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Deposition of gold on a PET film by pulsed DC magnetron sputtering
Pulsed DC magnetron sputtering was employed to deposit gold onto polyethylene terephthalate (PET) film. The optical properties of the gold coating were evaluated through reflectance and transmittance measurements using a Jasco V-770/SLM-907 spectrophotometer. Spectral analysis provides information about the colour, impurities, surface quality, and coating thickness. In sputtering experiments with a circular target, the gold coating exhibits a relatively uniform colour in the area opposite the target, with a thickness (df) greater than 60 nm and a resistance lower than 6 Ω. The coating thickness gradually decreases away from the center, therefore affecting other physical properties, so it should be considered and used for calculations when coating on a large substrate. The fabricated gold coating passes tests for adhesion, friction resistance and resistance to cleaning agents, making it suitable for industrial and daily applications such as decoration or making electrodes for biosensors and electronic components.
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