磁控溅射沉积纯硼涂层及其性能研究

IF 0.7 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

High Temperature Material Processes Pub Date : 2023-01-01 DOI:10.1615/hightempmatproc.2023050374

Alexey Nikolaev, Alexey Bugaev, Valeria Frolova, Vasily Gushenets, Efim Oks, Alexey Vizir

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引用次数: 0

摘要

我们使用平面磁控管在氩气环境中以高达50毫安的直流电流下将纯硼涂层沉积在不锈钢衬底上。该磁控管设计用于俄罗斯科学院西伯利亚分院Budker核物理研究所的电子-离子-等离子体试验台，利用VEPP-3电子存储环的同步辐射对硼沉积生长进行现场监测。利用该磁控管，我们制备了厚度达1.5 μ m的硼膜，并研究了其表面形貌、机械性能和涂层成分。

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Deposition of pure boron coatings by magnetron sputtering and investigation of their properties

We have deposited pure boron coatings on stainless-steel substrates using a planar magnetron with thermally insulated target of pure crystalline boron in a direct current discharge of up to 50 mA in an argon atmosphere. The magnetron was designed to be used as a component in an electron-ion-plasma test bench for in situ monitoring of boron deposition growth using synchrotron radiation from the VEPP-3 electron storage ring at the Budker Institute of Nuclear Physics of the Siberian Branch of the Russian Academy of Sciences. Using this magnetron, we have fabricated boron films with thickness up to 1.5 µm and studied their surface morphology, mechanical properties, and coating composition.

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来源期刊

High Temperature Material Processes 工程技术-材料科学：综合

CiteScore

1.20

自引率

25.00%

发文量

期刊介绍： High Temperature Material Processes is an important international publication devoted to original and invited review papers on fundamental and applied re-search and new developments in materials processing and synthesis at high temperatures, especially under the plasma action as well as the treatment by laser, ion and electron beams. Processes of interest include (but not limited to) surface treatments, alloying, coatings production, nanostructures synthesis, welding, cutting, melting, re-melting and purification of metals, metallurgy (among them plasma metallurgy), powder densification, ultra-fine powder production, waste conversion and destruction. In addition, attention is paid to the development, description and study of experimental and industrial systems and devices for the implementation of high-technology plasma and beam processes. Thus, there is a broad range of coverage of experimental, analytical and numerical studies. High Temperature Material Processes will serve the needs of those who develop high temperature processes to produce materials with improved properties, surface treatments or coatings with given specifications, and will also promote connections between laboratories and industry.