mems可调谐硅集成腔滤波器

2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF) Pub Date : 1900-01-01 DOI:10.1109/SIRF.2016.7445460

D. Peroulis, D. Psychogiou

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引用次数: 2

摘要

从高数据速率通信网络到安防监控系统，毫米波(mm-wave)频率(>30 GHz)越来越多地被新的应用所占据。因此，对能够在如此高的频率下工作并适应这些系统需求的高通用性RF滤波器的需求不断增加。一种新型的毫米波滤波器，由硅集成的倏逝模腔谐振器和MEMS波纹隔膜构成，最近被提出作为这些应用的潜在候选者。本文通过各种滤波器的演示实例，综述了该技术的特性及其射频性能的优点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS-tunable silicon-integrated cavity filters

Millimeter-wave (mm-wave) frequencies (>30 GHz) are more and more occupied by new sets of applications ranging from high-data rate communication networks to security and surveillance systems. As a result, the demand for highly-versatile RF filters that are able to operate at such high frequencies and accommodate the needs of these systems is continuously increasing. A new class of mm-wave filters that are structured by silicon-integrated evanescent-mode cavity resonators and MEMS corrugated diaphragms have recently being proposed as a prospective candidate for these applications. This paper provides a general review of the attributes of this technology and its RF performance merits through various filter demonstration examples.

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来源期刊

2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)

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