表面声波电机滑块接触面几何形状的优化

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906526

M. Kurosawa, H. Itoh, K. Asai, M. Takasaki, T. Higuchi

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引用次数: 28

摘要

报道了一种特大输出力表面声波(SAW)电机。SAW装置的驱动频率为9.6 MHz。采用硅面加工技术制备滑块。对于接触面，滑块有大量的投影来控制弹性接触条件。测试了25种不同的投影设计。采用4/spl倍/4 mm/sup 2/硅面微加工滑块，最大输出力为7.6 N，即约0.5 N/mm/sup 2/或50 N/cm/sup 2/。实验中电机的空载转速为0.7 m/sec。执行器的机械输出功率估计为1w。机械输出力和输出功率是MEMS执行器中最好的。

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Optimization of slider contact face geometry for surface acoustic wave motor

An extremely large output force surface acoustic wave (SAW) motor is reported. Driving frequency of the SAW device was 9.6 MHz. Sliders were fabricated with silicon surface machining. For the contact surface, the slider had a lot of projections to control elastic contact condition. Twenty five different projection designs were tested. Using a 4/spl times/4 mm/sup 2/ silicon surface micro fabricated slider, the maximum output force was 7.6 N. Namely, it was about 0.5 N/mm/sup 2/ or 50 N/cm/sup 2/. The no-loaded speed of the motor was 0.7 m/sec in the experiment. Estimated mechanical output power of the actuator was 1 W. The mechanical output force and output power are the best of all in MEMS actuators.

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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