微机电系统发展的要点

2008 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2008-05-21 DOI:10.1109/MEMSTECH.2008.4558754

H. Yuriy

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引用次数: 0

摘要

本文讨论了微机电系统的基本结构和主要发展问题。它还强调了最常用的MEMS部件类型的设计，并提到了最流行的MEMS应用。本文阐述了微机电系统开发的重点和任务。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The main points of the microelectromechanical systems development

In this paper the basic MEMS structure and main development problems are considered. It's also accented on the design of the most used types of MEMS parts and the most popular MEMS applications are mentioned. In this paper the main points and tasks of the microelectromechanical systems development are described.

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2008 International Conference on Perspective Technologies and Methods in MEMS Design

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