低温、低压、无焊剂、无板的Cu-Cu纳米颗粒瞬态液相烧结技术

Takehiro Yamamoto, M. K. Faiz, T. Suga, T. Miyashita, M. Yoshida
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摘要

在本工作中,通过Cu纳米颗粒和Sn-Bi共晶粉末的瞬态液相烧结(TLPS),在低温200℃、低压0.1MPa的条件下,实现了SiC功率模块中Cu-Cu无焊剂和无板的键合。本文采用差示扫描量热法(DSC)研究了两种Cu - Sn-Bi混合料在室温和150℃时的抗剪强度,并对其在150℃时的抗剪强度的影响因素进行了研究。在添加70质量%的Sn-Bi (Cu-70SnBi)时,在200℃烧结,139℃时由于Sn-Bi共晶相残留而发生重熔,导致150℃时抗剪强度下降。相反,在相同的烧结条件下,添加65质量%的Sn-Bi (Cu-65SnBi),在139℃下没有发生重熔事件,在150℃下获得的抗剪强度与室温(R. T.)几乎相似。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low temperature, low pressure, fluxless and plateless Cu-Cu bonding by Cu nano particle transient liquid phase sintering
In this work, low temperature of 200 °C, low pressure of 0.1MPa, fluxless and plateless Cu-Cu bonding in SiC power module is achieved by the transient phase liquid sintering (TLPS) of Cu nano particle and Sn-Bi eutectic powder. In this paper, shear strength at room temperature and 150 °C of two compositions of Cu mixed with Sn-Bi is investigated and the factor influencing the shear strength at 150 °C is examined by means of differential scanning calorimetry (DSC). In 70 mass% added Sn-Bi (Cu-70SnBi), which was sintered at 200 °C, the remelting event at 139 °C occurred due to the residual Sn-Bi eutectic phase and assumed to result in the decrease of shear strength at 150 °C. On contrary, in 65 mass% added Sn-Bi (Cu-65SnBi), which was sintered at the same conditions, remelting event at 139 °C was not observed, and the obtained shear strength at 150 °C was almost similar to that of at room temperature (R. T.).
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