用于未来光学仪器的MOEMS可变形镜的低温测试

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051447

F. Zamkotsian, P. Lanzoni, R. Barette, M. Helmbrecht, F. Marchis, Alex Teichman

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引用次数: 2

摘要

Iris AO MOEMS可变形镜在160K下成功运行和测试。测量了室温和低温下的表面变形，并分析了DM结构的贡献。

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Cryogenic testing of MOEMS deformable mirror for future optical instrumentation

An Iris AO MOEMS deformable mirror has been successfully operated and tested at 160K. Surface deformation at room temperature and in cryo has been measured and DM architecture contributions analyzed.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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