气-液-固生长和电子束蒸发法制备氧化铟锡纳米粒子的特性

Yan Shen, Jianxing Shen, Sima Dimitrijiev, Jisheng Han, Xiangang Xu
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引用次数: 0

摘要

氧化铟锡(ITO)薄膜作为透明导电层广泛应用于发光二极管和太阳能电池中。本文采用电子束蒸发技术,通过控制蒸发过程中的氧气流量,制备了ITO纳米微丝。在特定的气-液-固(VLS)生长条件下,出现了ITO纳米微泡。采用扫描电镜(SEM)、原子力显微镜(AFM)和紫外-可见光谱仪对纳米isker ITO薄膜进行了分析。薄膜具有粗糙的表面形貌和良好的透明电流扩散。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characteristics of indium-tin-oxide nanowiskers grown by vapor-liquid-solid growth method and electron-beam evaporation technique
Indium-tin-oxide (ITO) films are widely applied as the transparent conductive layers in light emitting diodes and solar cells. In this paper, ITO nanowiskers have been obtained by controlling the oxygen flow in the process of evaporation by electron-beam evaporation technique. ITO nanowiskers appeared for specific vapor-liquid-solid (VLS) growth conditions in the process. Nanowisker ITO films were analyzed by SEM, AFM, and ultraviolet-visual spectrometer. The films exhibit rough surface morphology with excellent transparent current spreading.
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