微通道内流动过渡的微米分辨率粒子图像测速实验研究

R. Zeighami, D. Laser, P. Zhou, M. Asheghi, S. Devasenathipathy, T. Kenny, J. Santiago, K. Goodson
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引用次数: 27

摘要

微通道散热器在先进电子系统的冷却应用中前景广阔。需要更多的研究来了解微通道的流动状态。最近水力直径在50 - 300 /spl mu/m之间的微通道的压降数据表明,向湍流的过渡可能发生在低于预期雷诺数的情况下。本研究使用微米分辨率粒子成像测速仪(/spl mu/PIV)和950 nm粒子的荧光显微镜研究微通道中的湍流过渡。采用深度反应离子蚀刻技术制备尺寸为150 /spl μ /m/spl倍/100 /spl μ /m/spl倍/ 1cm的硅通道,并用玻璃板密封。200Re的速度场数据>1600,低于之前在形状相似的较大通道中测量到的2200附近的值。这种差异可能是由壁面粗糙度、粘性热产生或电动效应引起的。这里开发的实验方法为微通道中湍流过渡的详细研究提供了基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental investigation of flow transition in microchannels using micron-resolution particle image velocimetry
Microchannel heat sinks are promising for cooling applications in advanced electronic systems. More research is needed to understand microchannel flow regimes. Recent pressure drop data in microchannels with hydraulic diameters between 50 and 300 /spl mu/m suggest that the transition to turbulence may occur at lower than expected values of the Reynolds number. This work studies turbulent transition in microchannels using micron-resolution particle imaging velocimetry (/spl mu/PIV) with epifluorescent microscopy of 950 nm particles. Silicon channels with dimensions 150 /spl mu/m/spl times/100 /spl mu/m/spl times/1 cm are fabricated using deep reactive ion etching and sealed using a glass plate. Velocity field data for 200Re>1600, which is lower than values near 2200 measured previously for larger channels with similar shapes. This discrepancy may be caused by wall roughness, viscous heat generation, or electrokinetic effects. The experimental approach developed here provides the groundwork for a detailed study of turbulence transition in microchannels.
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