用CVD法在硅基上制备的金刚石薄膜及其结构的性质

A. Saidov, Sh. N. Usmonov, U. Rakhmonov
{"title":"用CVD法在硅基上制备的金刚石薄膜及其结构的性质","authors":"A. Saidov, Sh. N. Usmonov, U. Rakhmonov","doi":"10.26577/phst.2023.v10.i1.05","DOIUrl":null,"url":null,"abstract":"At present, the technology of obtaining diamond films on silicon and other substrates is well studied. How - ever, in all published works to date, there has been no report of a layer of silicon carbide formed between the diamond film and the silicon substrate. The presence of a layer (15R-SiС) 1-x (C diamond ) x in the structure was revealed in the studies of structures with a diamond film obtained by us on silicon substrates by chemical vapor deposition. Diamond films were obtained on single-crystal silicon substrates with (111) orientation and n-type conductivity by the well-known CVD technology in a hydrogen-methanol (CH 3 OH) mixture with the addition of a certain amount (know-how) of ammonia (NH 3 ). The diamond films consisted of small single crystals 3–5 µm in size, closely interlocked and constituting a continuous film. When studying the current-voltage characteristics of structures created on the basis of the obtained diamond films, a blue-white glow with a blue-violet tint was observed, which is explained by the mixing of blue-violet photons with photons re-emitted in the diamond film.","PeriodicalId":321102,"journal":{"name":"Physical Sciences and Technology","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Diamond films obtained on silicone substrates by the CVD method and properties of structures based on them\",\"authors\":\"A. Saidov, Sh. N. Usmonov, U. Rakhmonov\",\"doi\":\"10.26577/phst.2023.v10.i1.05\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"At present, the technology of obtaining diamond films on silicon and other substrates is well studied. How - ever, in all published works to date, there has been no report of a layer of silicon carbide formed between the diamond film and the silicon substrate. The presence of a layer (15R-SiС) 1-x (C diamond ) x in the structure was revealed in the studies of structures with a diamond film obtained by us on silicon substrates by chemical vapor deposition. Diamond films were obtained on single-crystal silicon substrates with (111) orientation and n-type conductivity by the well-known CVD technology in a hydrogen-methanol (CH 3 OH) mixture with the addition of a certain amount (know-how) of ammonia (NH 3 ). The diamond films consisted of small single crystals 3–5 µm in size, closely interlocked and constituting a continuous film. When studying the current-voltage characteristics of structures created on the basis of the obtained diamond films, a blue-white glow with a blue-violet tint was observed, which is explained by the mixing of blue-violet photons with photons re-emitted in the diamond film.\",\"PeriodicalId\":321102,\"journal\":{\"name\":\"Physical Sciences and Technology\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physical Sciences and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.26577/phst.2023.v10.i1.05\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physical Sciences and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.26577/phst.2023.v10.i1.05","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

目前,在硅和其他衬底上获得金刚石薄膜的技术得到了很好的研究。然而,到目前为止,在所有已发表的作品中,还没有关于在金刚石薄膜和硅衬底之间形成碳化硅层的报道。用化学气相沉积法在硅衬底上制备金刚石膜,在结构中发现了一层(15R-SiС) 1-x (C金刚石)x。在氢-甲醇(ch3oh)混合物中加入一定量的氨气(nh3),采用著名的CVD技术在单晶硅衬底上制备了(111)取向和n型电导率的金刚石薄膜。金刚石薄膜由尺寸为3-5µm的小单晶组成,紧密互锁,构成连续薄膜。在研究基于所获得的金刚石薄膜所产生的结构的电流-电压特性时,观察到一种带有蓝紫色调的蓝白光,这可以解释为蓝紫色光子与金刚石薄膜中重新发射的光子混合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diamond films obtained on silicone substrates by the CVD method and properties of structures based on them
At present, the technology of obtaining diamond films on silicon and other substrates is well studied. How - ever, in all published works to date, there has been no report of a layer of silicon carbide formed between the diamond film and the silicon substrate. The presence of a layer (15R-SiС) 1-x (C diamond ) x in the structure was revealed in the studies of structures with a diamond film obtained by us on silicon substrates by chemical vapor deposition. Diamond films were obtained on single-crystal silicon substrates with (111) orientation and n-type conductivity by the well-known CVD technology in a hydrogen-methanol (CH 3 OH) mixture with the addition of a certain amount (know-how) of ammonia (NH 3 ). The diamond films consisted of small single crystals 3–5 µm in size, closely interlocked and constituting a continuous film. When studying the current-voltage characteristics of structures created on the basis of the obtained diamond films, a blue-white glow with a blue-violet tint was observed, which is explained by the mixing of blue-violet photons with photons re-emitted in the diamond film.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信