简单铝门技术产生高比特密度

G. Meusburger, Hermann Keller
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引用次数: 0

摘要

本文将描述一种采用n通道al栅极技术的2.5¿m设计规则的单晶体管存储单元。由于一种新颖的设计特点,比特密度达到5720 bit/mm2。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simple Al-Gate-Technology Yields High Bit-Density
A single-transistor memory cell in n-channel-Al-gate technology with 2.5 ¿m design rules will be described. Due to a novel design feature a bit density of 5720 bit/mm2 has been achieved.
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