使用微型迈克尔逊干涉仪作为光学探头的光学轮廓

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318826

M. Malak, F. Marty, H. Nouira, J. Salgado, T. Bourouina

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引用次数: 2

摘要

本文报道了利用微型化迈克尔逊干涉仪作为光学探头进行剖面测量的方法。采用了两种表征技术:光谱响应的FFT和单色光。所得轮廓与商用设备得到的轮廓进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical profiling using a miniature michelson interferometer as an optical probe

We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.

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2012 International Conference on Optical MEMS and Nanophotonics

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