一种高灵敏度pt掺杂ZnO乙醇传感器

2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT) Pub Date : 2017-11-01 DOI:10.1109/ICETCCT.2017.8280323

Manish Deshwal, A. Arora

{"title":"一种高灵敏度pt掺杂ZnO乙醇传感器","authors":"Manish Deshwal, A. Arora","doi":"10.1109/ICETCCT.2017.8280323","DOIUrl":null,"url":null,"abstract":"A chemoresistive sensor for ethanol with Pt-microdots doped zinc oxide (ZnO) thin film as sensing layer has been studied with a coplanar microheater architecture with inter-digitated electrodes (IDE's). ZnO thin films are fabricated using the sol-gel method. The doping with platinum is performed by RF Sputtering method. The present study suggests the use of a coplanar microheater with IDE's fabricated for the ethanol sensor. Further, the effect of doping on sensing properties of the sensor has been studied. The sensing response of the sensor with the film thickness of 430 nm at an operating temperature of 180°C comes out to be 110. The prime aim of the study is to present a highly sensitive ethanol sensor having a coplanar architecture of microheater with IDE's in a ZnO based sensor.","PeriodicalId":436902,"journal":{"name":"2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT)","volume":"230 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A highly sensitive Pt-doped ZnO based Ethanol sensor\",\"authors\":\"Manish Deshwal, A. Arora\",\"doi\":\"10.1109/ICETCCT.2017.8280323\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A chemoresistive sensor for ethanol with Pt-microdots doped zinc oxide (ZnO) thin film as sensing layer has been studied with a coplanar microheater architecture with inter-digitated electrodes (IDE's). ZnO thin films are fabricated using the sol-gel method. The doping with platinum is performed by RF Sputtering method. The present study suggests the use of a coplanar microheater with IDE's fabricated for the ethanol sensor. Further, the effect of doping on sensing properties of the sensor has been studied. The sensing response of the sensor with the film thickness of 430 nm at an operating temperature of 180°C comes out to be 110. The prime aim of the study is to present a highly sensitive ethanol sensor having a coplanar architecture of microheater with IDE's in a ZnO based sensor.\",\"PeriodicalId\":436902,\"journal\":{\"name\":\"2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT)\",\"volume\":\"230 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICETCCT.2017.8280323\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICETCCT.2017.8280323","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

研究了一种以掺杂氧化锌(ZnO)薄膜为传感层的pt微点乙醇化学电阻传感器，该传感器采用共面微加热器结构和互指电极结构。采用溶胶-凝胶法制备了ZnO薄膜。采用射频溅射法掺杂铂。本研究建议采用IDE共面微加热器制作乙醇传感器。此外，还研究了掺杂对传感器传感性能的影响。薄膜厚度为430 nm的传感器在180℃工作温度下的传感响应为110。该研究的主要目的是提出一种高灵敏度的乙醇传感器，该传感器具有微加热器的共面结构，并在基于ZnO的传感器中使用IDE。

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A highly sensitive Pt-doped ZnO based Ethanol sensor

A chemoresistive sensor for ethanol with Pt-microdots doped zinc oxide (ZnO) thin film as sensing layer has been studied with a coplanar microheater architecture with inter-digitated electrodes (IDE's). ZnO thin films are fabricated using the sol-gel method. The doping with platinum is performed by RF Sputtering method. The present study suggests the use of a coplanar microheater with IDE's fabricated for the ethanol sensor. Further, the effect of doping on sensing properties of the sensor has been studied. The sensing response of the sensor with the film thickness of 430 nm at an operating temperature of 180°C comes out to be 110. The prime aim of the study is to present a highly sensitive ethanol sensor having a coplanar architecture of microheater with IDE's in a ZnO based sensor.

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2017 International Conference on Emerging Trends in Computing and Communication Technologies (ICETCCT)

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