多自由度谐振器的频率分辨率

2009 IEEE Sensors Pub Date : 2009-10-01 DOI:10.1109/ICSENS.2009.5398243

K. Moran, B. DeMartini, K. Turner, K. Åstrom

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引用次数: 2

摘要

本文概述了多自由度微谐振器中可测参数的估计过程。热机械噪声为微谐振器的频率分辨率提供了一个基线限制。建立了二自由度谐振器线性回归模型的似然函数。利用Cramer-Rao不等式，我们确定了最小可能的协方差来估计参数，如系统的固有频率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Frequency resolution of a multi degree of freedom resonator

This paper outlines the process for estimating measurable parameters in a multi degree of freedom micro resonator. Thermal mechanical noise provides a baseline limit for frequency resolution of micro resonators. We develop the likelihood function for a linear regression model of 2 degree of freedom resonator. Using the Cramer-Rao inequality we determine the minimum possible covariance to estimate parameters, such as the natural frequency of the system.

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2009 IEEE Sensors

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