新型半透明非晶硅传感器[位置传感器]表征的初步结果

Proceedings of the 21st IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.04CH37510) Pub Date : 2004-05-18 DOI:10.1109/IMTC.2004.1351235

A. Calderon, A. Virto, J. Luque

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引用次数: 0

摘要

我们首次介绍了新一代半透明非晶硅位置探测器的性能，该探测器具有非常好的性能，如精度优于5 /spl mu/m，偏转角小于10 /spl mu/rad，可见光透射率高于70%。此外，敏感区域非常大:30/spl倍/30厘米/sup 2/。

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First results on the characterization of new semitransparent amorphous silicon sensors [position sensors]

We present first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties such as a precision better than 5 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the visible higher than 70%. In addition the sensitive area is very large: 30/spl times/30 cm/sup 2/.

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Proceedings of the 21st IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.04CH37510)

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