Andrés Quintero, Fernando Cardes, L. Hernández, C. Buffa, A. Wiesbauer
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引用次数: 4
摘要
提出了一种基于环形振荡器的差分电容式微机电系统读出电路。通过将其调制到感兴趣的带宽以上的频率，然后进行滤波，可以减少闪烁噪声。开发了一种相当于传统开关电容电路中的斩波技术，并将其应用于由MEMS电容控制的单端环形振荡器中。在0.12 um CMOS工艺中设计了原型。仿真结果表明，该方法有效地抑制了闪烁噪声，提高了信噪比。
A Capacitance-to-Digital Converter Based on a Ring Oscillator with Flicker Noise Reduction
This paper presents a ring oscillator based readoutcircuit for differential capacitive MEMS. Flicker noise isreduced by modulating it to frequencies above the bandwidthof interest and then filtering. A technique equivalent tochopping in conventional switched capacitor circuits isdeveloped and applied to a single ended ring oscillatorcontrolled by the MEMS capacitance. A prototype wasdesigned in a 0.12 um CMOS process. Simulations show thatflicker noise is attenuated and Signal-to-Noise Ratio isimproved.
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