LiNbO/ sub3 /衬底溅射AlN薄膜的表面声波带通滤光性能

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. Pub Date : 2002-05-28 DOI:10.1109/ISAF.2002.1195953

K. Kao, Chien-Chuan Cheng, Ying-Chung Chen, Chien-Hsing Chen

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引用次数: 0

摘要

研究了z-cut LiNbO/sub - 3/衬底溅射氮化铝(AlN)薄膜的表面声波(SAW)滤波性能，如中心频率(F/sub -c /)和3dB带宽。采用反应性射频磁控溅射技术，在z-cut LiNbO/ sub3 /衬底上制备了高c轴择优取向AlN薄膜。实验结果表明，随着h//spl λ / (h为AlN膜厚度，/spl λ /为SAW波长)的增大，声呐滤光片的F/sub c/显著增大。通过与z切割LiNbO/sub - 3/单晶的声表面波传播比较，发现AlN/LiNbO/sub - 3/基表面波器件可以提高声表面波的传播速度。声表面波滤波器的3dB带宽随着h//spl λ /的增大而减小，这意味着频率选择变得更加严格。

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Surface acoustic wave bandpass filters properties of AlN thin films sputtered on LiNbO/sub 3/ substrates

Surface acoustic wave (SAW) filter properties such as center frequency (F/sub c/) and 3dB bandwidth of aluminum nitride (AlN) thin films sputtered on z-cut LiNbO/sub 3/ substrates were investigated. Highly c-axis prefer-oriented AlN thin films deposited on z-cut LiNbO/sub 3/ substrates were obtained by reactive rf magnetron sputtering. The results of our experiments showed that F/sub c/ of SAW filter was increased significantly for the increase of h//spl lambda/, where h was the AlN film thickness and /spl lambda/ was the wavelength of SAW. Comparing the SAW propagate along with the z-cut LiNbO/sub 3/ single crystal, the AlN/LiNbO/sub 3/ based surface acoustic wave (SAW) devices could improve the velocity of SAW. The 3dB bandwidth of SAW filter was decreased by the increase of h//spl lambda/ meaning that frequency selection getting stricter.

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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.

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