{"title":"FAROS -用于半导体制造中单晶圆跟踪的全自动机器人分选机集群","authors":"F. Heinlein, A. Kuehn","doi":"10.1109/ASMC.2006.1638742","DOIUrl":null,"url":null,"abstract":"In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8\" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system","PeriodicalId":407645,"journal":{"name":"The 17th Annual SEMI/IEEE ASMC 2006 Conference","volume":"11 1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing\",\"authors\":\"F. Heinlein, A. Kuehn\",\"doi\":\"10.1109/ASMC.2006.1638742\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8\\\" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system\",\"PeriodicalId\":407645,\"journal\":{\"name\":\"The 17th Annual SEMI/IEEE ASMC 2006 Conference\",\"volume\":\"11 1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 17th Annual SEMI/IEEE ASMC 2006 Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.2006.1638742\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 17th Annual SEMI/IEEE ASMC 2006 Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2006.1638742","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing
In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system
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