主要用户采用微型环境技术的经验

M. Rappa
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引用次数: 0

摘要

在过去的几年中,微环境技术的使用已迅速成为半导体集成电路制造中控制成本和减少颗粒污染的重要策略。然而,微型环境技术的实施在整个半导体工业中并不统一,特别是一些公认的领先公司在采用该技术方面进展缓慢。本文根据访谈和行业调查收集的数据,讨论了几位微型环境技术的主要用户的经验。一般来说,主要用户发现该技术在若干重要方面非常有益,包括成本和污染控制。主要用户的经验和看法与密切研究该技术但没有太多使用微型环境的实际经验的公司形成对比。领先用户报告了晶圆表面的显著成本节约和sub-Class 1,而非用户通常认为收益要少得多,特别是在成本方面。该技术有效性的一个迹象是,许多主要用户继续扩大对微型环境的投资。作者认为,与行业领导者相比,微型环境的主要用户可能会对技术的有用性提供更深入的了解,因为这些公司在学习曲线上走得更远。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The experience of lead users in the adoption of minienvironment technology
During the past few years, the use of minienvironment technology has rapidly emerged as an important strategy for containing cost and reducing particle contamination in semiconductor integrated circuit fabrication. However, implementation of minienvironment technology is not uniform throughout the semiconductor industry and, in particular, several well-recognized leading firms have been slow to adopt the technology. This paper discusses the experiences of several lead users of minienvironment technology based on data collected from interviews and an industry-wide survey. Generally speaking, lead users have found the technology to be quite beneficial on a number of important dimensions, including cost and contamination control. The experiences and perceptions of lead users provide a contrast to firms that have studied the technology closely, but do not have much actual experience using minienvironments. Lead users report significant cost savings and sub-Class 1 at the wafer surface, while non-users usually perceive far less benefit, particularly in terms of cost. One indication of the effectiveness of the technology is that many lead users continue to expand their investments in minienvironments. The author argues that, compared to industry leaders, lead users of minienvironments may provide greater insight into the usefulness of the technology because these firms are further along the learning curve.
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