10nm应变通道DG-纳米场效应管的建模与仿真

Kuleen Kumar, R. Dhar
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引用次数: 1

摘要

应变硅技术是亚10nm金属氧化物半导体场效应晶体管(MOSFET)设计中最有前途的技术之一。为了与先进的技术相匹配,节点设备的尺寸必须减小,这导致了几个短信道效应。利用应变硅技术开发了栅极长度为10nm的dg -纳米fet,为限制14nm沟道长度以外的性能退化提供了一个有希望的替代品。新设计的双栅(DG)-纳米场效应晶体管(fet)由s-Si/s-SiGe/s-Si三层体系组成,在沟道区域与轻掺杂的沟道区域,从而提高了沟道区域的迁移率。由于器件中两个栅极的额外控制,电荷载流子从源流向漏,在窄通道中经历量子载流子限制。与22nm的DG- SHOI FET相比,10nm的应变沟道DG- SHOI FET的漏极电流增加了57.5%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling and Simulation of 10nm Strained Channel DG- Nano-FET
Strained silicon technology is one of the promising technology for sub-10nm Metal Oxide Semiconductor Field Effect Transistor (MOSFET) design. To match with advance technology node device dimension have to reduce which leads to several short channel effects. By using strain silicon technology DG-Nano-FET is developed at 10nm gate length providing a promising substitute in order to restrict performance degradation beyond 14nm channel length. The newly designed double gate (DG)-Nano-FET modeled here comprises of the three layer system as s-Si/s-SiGe/s-Si in channel region with lightly doped channel, which result in mobility enhancement in channel region. Due to additional control with two gates in the device the charge carriers flows from source to drain experiencing quantum carrier confinement in the narrow channel. The strained channel DG-Nano-FET developed on 10nm channel length have 57.5% enrichment in drain current as comparison to 22nm DG – SHOI FET.
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