{"title":"通用润湿性调制碳纳米管薄膜的无蚀刻方法","authors":"Rui Qiu, Qinqi Ren, Qi Liu, Lei Lu, Min Zhang","doi":"10.1109/NMDC46933.2022.10052161","DOIUrl":null,"url":null,"abstract":"Non-destructive patterning of low-dimensional materials has always been a challenge. An etching-free patterning method for high-density carbon nanotube (CNT) network has been proposed based on a wettability modulation method. By adopting this method, we have realized high-resolution patterns of CNT films, which have been uniformly formed on the wetting regions with precise boundaries. A flexible thin-film transistor array has been further realized, which shows excellent electrical performance with on/off current ratio of 104 as well as subthreshold swing of 280 mV/dec. This high-efficiency, high-resolution, and etching-free patterning approach of CNTs holds great promise for numerous potential applications in flexible and stretchable electronics and provides general solution for the low-temperature low-dimension material fabrications of advanced electronics.","PeriodicalId":155950,"journal":{"name":"2022 IEEE Nanotechnology Materials and Devices Conference (NMDC)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An Etching-Free Method for Patterning Carbon Nanotube Films Enabled by Universal Wettability Modulation\",\"authors\":\"Rui Qiu, Qinqi Ren, Qi Liu, Lei Lu, Min Zhang\",\"doi\":\"10.1109/NMDC46933.2022.10052161\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Non-destructive patterning of low-dimensional materials has always been a challenge. An etching-free patterning method for high-density carbon nanotube (CNT) network has been proposed based on a wettability modulation method. By adopting this method, we have realized high-resolution patterns of CNT films, which have been uniformly formed on the wetting regions with precise boundaries. A flexible thin-film transistor array has been further realized, which shows excellent electrical performance with on/off current ratio of 104 as well as subthreshold swing of 280 mV/dec. This high-efficiency, high-resolution, and etching-free patterning approach of CNTs holds great promise for numerous potential applications in flexible and stretchable electronics and provides general solution for the low-temperature low-dimension material fabrications of advanced electronics.\",\"PeriodicalId\":155950,\"journal\":{\"name\":\"2022 IEEE Nanotechnology Materials and Devices Conference (NMDC)\",\"volume\":\"31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE Nanotechnology Materials and Devices Conference (NMDC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NMDC46933.2022.10052161\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Nanotechnology Materials and Devices Conference (NMDC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NMDC46933.2022.10052161","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An Etching-Free Method for Patterning Carbon Nanotube Films Enabled by Universal Wettability Modulation
Non-destructive patterning of low-dimensional materials has always been a challenge. An etching-free patterning method for high-density carbon nanotube (CNT) network has been proposed based on a wettability modulation method. By adopting this method, we have realized high-resolution patterns of CNT films, which have been uniformly formed on the wetting regions with precise boundaries. A flexible thin-film transistor array has been further realized, which shows excellent electrical performance with on/off current ratio of 104 as well as subthreshold swing of 280 mV/dec. This high-efficiency, high-resolution, and etching-free patterning approach of CNTs holds great promise for numerous potential applications in flexible and stretchable electronics and provides general solution for the low-temperature low-dimension material fabrications of advanced electronics.