1.3μm条纹激光中GaInAsP/InP双异质结构材料的生长与表征

S. Hersee, A. Carter, R. Goodfellow, G. Hawkins, I. Griffith
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引用次数: 2

摘要

本文描述了用于制造近1-3μm激光二极管的GalnAsP/InP双异质结构多层膜的生长和表征。采用了单相生长技术,实现了良好的均匀性、晶格匹配和波长控制。接触电阻分布技术已广泛应用于建立一种生长过程,有效地抑制锌从高掺杂盖层中扩散。用该材料制造的激光器显示出良好的再现性,对于10 μ m宽的氧化条纹器件,脉冲室温阈值低至140 mA。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth and characterisation of GaInAsP/InP double heterostructure material for stripe-geometry lasers emitting near 1.3μm
This paper describes the growth and characterisation of double heterostructure multilayers of GalnAsP/InP for the fabrication of laser diodes emitting near 1-3μm. A single-phase growth technique has been employed enabling good uniformity, lattice match and wavelength control. The contact resistance profiling technique has been extensively used in the establishment of a growth procedure which effectively suppresses the diffusion of zinc from the heavily doped capping layer. Lasers fabricated from the material have shown good reproducibility, with pulsed room-temperature thresholds as low as 140 mA for 10 ?m wide oxide stripe devices.
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