微型石英谐振器热探测器

IEEE 1985 Ultrasonics Symposium Pub Date : 1900-01-01 DOI:10.1109/ULTSYM.1985.198533

J. Ralph, R. King, J. E. Curran, J. S. Page

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引用次数: 12

摘要

这项工作描述了最近尝试实现在100 MHz下作为热红外探测器工作的20Ox200pm方形10 pm厚石英谐振器的潜在性能的结果。小型金网格电极的可行性已经得到证实，它与Ni/Cr结构一起应该提供高的红外吸收。为了达到接近背景极限的性能，必须降低目前的高频波动噪声。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Miniature Quartz Resonator Thermal Detector

This work describes the results of recent attempts to realise the potential performance of a 20Ox200pm square 10 pm thick quartz resonator operating at 100 MHz as a thermal infrared detector. The feasibility of small gold grid electrodes has been demonstrated, which together with a Ni/Cr structure should provide high infrared absorption. Reduction of the presently high frequency fluctuation noise will be necessary to achieve performance close to the background limit.

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IEEE 1985 Ultrasonics Symposium

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