{"title":"一种用于减少混合信号集成电路中衬底耦合的后处理方法","authors":"P. Basedau, Qiuting Huang","doi":"10.1109/VLSIC.1995.520679","DOIUrl":null,"url":null,"abstract":"Due to the heavily doped substrate material in modern MOS technologies, digital interference couples to sensitive analog nodes much more easily than in technologies with p/sup -/ substrates. The guard ring method of isolating sensitive nodes is no longer as effective as before. In this contribution we investigate the isolation of analog circuits by etching a gap between analog and digital circuits from the back of the wafer. Experiments show that interference coupling 35 dB above noise floor is completely removed when a gap is etched around the analog circuit.","PeriodicalId":256846,"journal":{"name":"Digest of Technical Papers., Symposium on VLSI Circuits.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":"{\"title\":\"A post processing method for reducing substrate coupling in mixed-signal integrated circuits\",\"authors\":\"P. Basedau, Qiuting Huang\",\"doi\":\"10.1109/VLSIC.1995.520679\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Due to the heavily doped substrate material in modern MOS technologies, digital interference couples to sensitive analog nodes much more easily than in technologies with p/sup -/ substrates. The guard ring method of isolating sensitive nodes is no longer as effective as before. In this contribution we investigate the isolation of analog circuits by etching a gap between analog and digital circuits from the back of the wafer. Experiments show that interference coupling 35 dB above noise floor is completely removed when a gap is etched around the analog circuit.\",\"PeriodicalId\":256846,\"journal\":{\"name\":\"Digest of Technical Papers., Symposium on VLSI Circuits.\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"15\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Technical Papers., Symposium on VLSI Circuits.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSIC.1995.520679\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Technical Papers., Symposium on VLSI Circuits.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIC.1995.520679","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A post processing method for reducing substrate coupling in mixed-signal integrated circuits
Due to the heavily doped substrate material in modern MOS technologies, digital interference couples to sensitive analog nodes much more easily than in technologies with p/sup -/ substrates. The guard ring method of isolating sensitive nodes is no longer as effective as before. In this contribution we investigate the isolation of analog circuits by etching a gap between analog and digital circuits from the back of the wafer. Experiments show that interference coupling 35 dB above noise floor is completely removed when a gap is etched around the analog circuit.
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