大型强子对撞机升级用大面积微带辐射硅传感器的技术解决方案

J. Fernandez-Tejero, M. Ullán, C. Fleta, D. Quirion
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引用次数: 1

摘要

针对ATLAS探测器的升级,提出了大面积微带辐射硅传感器的技术解决方案。开发了一种新的自动布局生成工具,以方便地适应传感器的设计,并研究了6英寸晶圆技术所涉及的制造工艺。给出了原型传感器的条带间和辐射硬度特性,显示出与新规范的一致性。研究了嵌入式螺距适配器的概念,作为即将到来的ATLAS升级的传感器/读出互连的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Technological solutions for large area microstrip radiation silicon sensors for the LHC Upgrade
Technological solutions for the transfer to large area microstrip radiation silicon sensors are presented for the upgrade of the ATLAS detector. A new Automatic Layout Generation Tool has been developed to easily adapt the design of the sensors, investigating also the fabrication processes involved in 6-inch wafer technology. Inter-strip and radiation hardness characterization of prototype sensors is presented, showing an agreement with the new specifications. Embedded Pitch Adaptor concept is studied as a solution for the sensor/readout interconnection for the forthcoming ATLAS Upgrade.
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