液体中高频体声谐振微天平

Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005. Pub Date : 2005-08-31 DOI:10.1109/FREQ.2005.1573905

Hao F. Zhang, W. Pang, E. S. Kim

{"title":"液体中高频体声谐振微天平","authors":"Hao F. Zhang, W. Pang, E. S. Kim","doi":"10.1109/FREQ.2005.1573905","DOIUrl":null,"url":null,"abstract":"In this paper, we present two types of high-frequency bulk acoustic resonant microbalances based on (1) film bulk acoustic resonator (FBAR) and (2) high-tone bulk acoustic resonator (HBAR). Both resonators are operating at about 900 MHz, hundred times higher than a typical quartz crystal microbalance (QCM). Mass sensitivities of the FBAR and HBAR microbalances are measured to be 782.7 (50 times larger than that of QCM) and 9.3 cm2/g, respectively. The minimum detectable frequency changes for the FBAR and HBAR are measured to be about 2 and 0.1 kHz, respectively. Based on the mass sensitivities and minimum detectable frequency changes, the minimum detectable mass change for the FBAR and HBAR are estimated to be 4 ng/cm2 (comparable to that of QCM) and 10 ng/cm2, respectively","PeriodicalId":108334,"journal":{"name":"Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.","volume":"489 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"High-frequency bulk acoustic resonant microbalances in liquid\",\"authors\":\"Hao F. Zhang, W. Pang, E. S. Kim\",\"doi\":\"10.1109/FREQ.2005.1573905\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we present two types of high-frequency bulk acoustic resonant microbalances based on (1) film bulk acoustic resonator (FBAR) and (2) high-tone bulk acoustic resonator (HBAR). Both resonators are operating at about 900 MHz, hundred times higher than a typical quartz crystal microbalance (QCM). Mass sensitivities of the FBAR and HBAR microbalances are measured to be 782.7 (50 times larger than that of QCM) and 9.3 cm2/g, respectively. The minimum detectable frequency changes for the FBAR and HBAR are measured to be about 2 and 0.1 kHz, respectively. Based on the mass sensitivities and minimum detectable frequency changes, the minimum detectable mass change for the FBAR and HBAR are estimated to be 4 ng/cm2 (comparable to that of QCM) and 10 ng/cm2, respectively\",\"PeriodicalId\":108334,\"journal\":{\"name\":\"Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.\",\"volume\":\"489 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-08-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2005.1573905\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2005.1573905","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 8

摘要

本文提出了两种基于(1)薄膜体声谐振器(FBAR)和(2)高频体声谐振器(HBAR)的高频体声谐振微天平。两个谐振器的工作频率约为900兆赫，比典型的石英晶体微天平(QCM)高100倍。FBAR和HBAR微天平的质量灵敏度分别为782.7(比QCM大50倍)和9.3 cm2/g。FBAR和HBAR的最小可检测频率变化分别约为2和0.1 kHz。基于质量灵敏度和最小可检测频率变化，FBAR和HBAR的最小可检测质量变化估计分别为4 ng/cm2(与QCM相当)和10 ng/cm2

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

High-frequency bulk acoustic resonant microbalances in liquid

In this paper, we present two types of high-frequency bulk acoustic resonant microbalances based on (1) film bulk acoustic resonator (FBAR) and (2) high-tone bulk acoustic resonator (HBAR). Both resonators are operating at about 900 MHz, hundred times higher than a typical quartz crystal microbalance (QCM). Mass sensitivities of the FBAR and HBAR microbalances are measured to be 782.7 (50 times larger than that of QCM) and 9.3 cm2/g, respectively. The minimum detectable frequency changes for the FBAR and HBAR are measured to be about 2 and 0.1 kHz, respectively. Based on the mass sensitivities and minimum detectable frequency changes, the minimum detectable mass change for the FBAR and HBAR are estimated to be 4 ng/cm2 (comparable to that of QCM) and 10 ng/cm2, respectively

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.

自引率

0.00%

发文量