mems -陀螺仪技术的现状及发展趋势

2015 Fifth International Conference on Instrumentation and Measurement, Computer, Communication and Control (IMCCC) Pub Date : 2015-09-01 DOI:10.1109/IMCCC.2015.159

Xiaolong Li, Wei Xiao, Yu Fei

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引用次数: 9

摘要

随着微机电系统技术的飞速发展，微机电陀螺仪以其体积小、重量轻、成本低、环境适应性强等优点得到了广泛的应用，包括民用和军用领域。本文首先从mems陀螺仪的基本力学、内部结构和基本特性的性能分析等方面介绍了mems陀螺仪的工作原理。然后对MEMS陀螺仪技术的发展现状进行了介绍和分析。并基于三种不同的市场条件和工作环境，讨论了MEMS陀螺仪的应用。最后，从技术和市场的角度分析了MEMS陀螺仪的发展趋势。

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Status Quo and Developing Trend of MEMS-Gyroscope Technology

With the rapid development of MEMS technology, MEMS-gyroscopes with its perfect characteristics of small size, light weight, low cost and environmental adaptability are getting a wild rang application including both civilian and military fields. At first, this paper introduces how the MEMS-gyroscope works from the basic mechanics, the internal structure and performance analysis of basic characteristics. And then the paper presents and analyzes the current status of the development of MEMS gyroscope technology. And based three different market conditions and working environments, the applications of MEMS gyroscopes are discussed in this paper. Finally, the developing trends of MEMS gyroscopes are analyzed from the technological and market perspectives.

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来源期刊

2015 Fifth International Conference on Instrumentation and Measurement, Computer, Communication and Control (IMCCC)

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