提高了透明塑料衬底上沉积的a-Si TFT在高温下的可靠性

63rd Device Research Conference Digest, 2005. DRC '05. Pub Date : 2005-06-22 DOI:10.1109/DRC.2005.1553094

K. Long, A. Kattamis, I. Cheng, H. Gleskova, S. Wagner, J. Sturm

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引用次数: 2

摘要

在本文中，作者开发了透明塑料基板上的a-Si TFT工艺，该工艺允许将玻璃上的工业a-Si TFT工艺直接转移到塑料基板上，用于柔性电子应用。高温工艺提高了a- si TFT的可靠性，这对于必须在直流条件下工作的OLED至关重要

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Increased reliability of a-Si TFT's deposited on clear plastic substrates at high temperatures

In this paper, the authors have developed an a-Si TFT process on clear plastic substrates which allows direct transfer of industry a-Si TFT process on glass to plastic substrate for flexible electronics applications. The high temperature process increases the reliability of the a-Si TFT's, which is critical for OLED's where one TFT must operate in a DC condition

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63rd Device Research Conference Digest, 2005. DRC '05.

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