激光显示用硅光扫描仪的研制

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 1900-01-01 DOI:10.1109/OMEMS.2000.879604

Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, K. Lee, D. Jeon

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引用次数: 34

摘要

提出了一种用于激光显示的垂直驱动静电扫描仪的制作新工艺。该扫描仪由两个具有垂直梳的结构组成。梳子用ICP - RIE蚀刻，并用共晶键合对准器组装。

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Fabrication of silicon optical scanner for laser display

A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.

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来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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