{"title":"后cmp刷式洗涤器的高级故障检测方法","authors":"Yohei Hamaguchi, Shin Aoyama, Tetsuya Tayama, Tsuyoshi Miyatake, Hidehiko Kawaguchi","doi":"10.1109/ISSM.2018.8651144","DOIUrl":null,"url":null,"abstract":"We have developed an advanced fault detection method for post-Chemical Mechanical Polisher (CMP) scrubbers to detect actual rotation statuses. We have found out a relationship between rotation statuses and motor torques by theoretical consideration. We have verified the consideration by measuring the motor torques of two types of mass-production brush scrubbers, roller and pencil brush scrubbers. We are quite confident our method is effective to enhance productivity of the scrubbers.","PeriodicalId":262428,"journal":{"name":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An Advanced Fault Detection Method for Post-CMP Brush Scrubbers\",\"authors\":\"Yohei Hamaguchi, Shin Aoyama, Tetsuya Tayama, Tsuyoshi Miyatake, Hidehiko Kawaguchi\",\"doi\":\"10.1109/ISSM.2018.8651144\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed an advanced fault detection method for post-Chemical Mechanical Polisher (CMP) scrubbers to detect actual rotation statuses. We have found out a relationship between rotation statuses and motor torques by theoretical consideration. We have verified the consideration by measuring the motor torques of two types of mass-production brush scrubbers, roller and pencil brush scrubbers. We are quite confident our method is effective to enhance productivity of the scrubbers.\",\"PeriodicalId\":262428,\"journal\":{\"name\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"81 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2018.8651144\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2018.8651144","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An Advanced Fault Detection Method for Post-CMP Brush Scrubbers
We have developed an advanced fault detection method for post-Chemical Mechanical Polisher (CMP) scrubbers to detect actual rotation statuses. We have found out a relationship between rotation statuses and motor torques by theoretical consideration. We have verified the consideration by measuring the motor torques of two types of mass-production brush scrubbers, roller and pencil brush scrubbers. We are quite confident our method is effective to enhance productivity of the scrubbers.
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