双栅mosfet亚阈值摆幅的解析模型

Zhihao Ding, Guangxi Hu, Jinglun Gu, Ran Liu, Lingli Wang, T. Tang
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引用次数: 12

摘要

提出了对称双栅(SDG) n-MOSFET的模型。对泊松方程进行解析求解,得到通道电位。给出了阈下摆动的解析表达式。模型结果与美第奇模拟结果进行了比较,结果吻合较好。通过增加沟道长度、减小硅体厚度或栅极氧化物厚度以及增加硅体掺杂浓度,可以改善SDG MOSFET的亚阈值摆幅。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An analytical model for the subthreshold swing of double-gate MOSFETs
A model for the Symmetric Double-Gate (SDG) n-MOSFET is presented. Poisson equation is solved analytically and channel potential is obtained. The analytical expression for subthreshold swing is achieved. Model results are compared with Medici simulations, good agreement is observed. The subthreshold swing of an SDG MOSFET will be improved by increasing the channel length, by reducing either the silicon body thickness or the gate oxide thickness, and by increasing the silicon body doping concentration.
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