基于SiO2/HfO2堆叠栅极结构的SEL-BOX和传统SOI TFET直流和射频性能研究

A. K. Singh, Dhruvajyoti Barah, M. Tripathy, K. Baral, S. Chander, P. Singh, S. Jit
{"title":"基于SiO2/HfO2堆叠栅极结构的SEL-BOX和传统SOI TFET直流和射频性能研究","authors":"A. K. Singh, Dhruvajyoti Barah, M. Tripathy, K. Baral, S. Chander, P. Singh, S. Jit","doi":"10.1109/IEMENTech48150.2019.8981284","DOIUrl":null,"url":null,"abstract":"Here, we have reported an n-type SEL-BOX TFET with SiO2/HfO2Stacked Gate Structure. The SEL-BOX structure provides low off-state current and reduces self-heating effect unlike in SOI structure. The metal work function is also chosen such that the reverse tunnelling i.e. tunneling from drain to channel gets restricted due to formation of barrier within the channel region. This is not only result of high on-state current but also very low off-state current, which provides high ION/IOFFratio. Here we have compared analytical modelled surface potential, electric field and drain current with simulated data of ATLAS TCAD tool.","PeriodicalId":243805,"journal":{"name":"2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Study and Investigation of DC and RF Performance of TFET on SEL-BOX and Conventional SOI TFET with SiO2/HfO2 Stacked Gate Structure\",\"authors\":\"A. K. Singh, Dhruvajyoti Barah, M. Tripathy, K. Baral, S. Chander, P. Singh, S. Jit\",\"doi\":\"10.1109/IEMENTech48150.2019.8981284\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Here, we have reported an n-type SEL-BOX TFET with SiO2/HfO2Stacked Gate Structure. The SEL-BOX structure provides low off-state current and reduces self-heating effect unlike in SOI structure. The metal work function is also chosen such that the reverse tunnelling i.e. tunneling from drain to channel gets restricted due to formation of barrier within the channel region. This is not only result of high on-state current but also very low off-state current, which provides high ION/IOFFratio. Here we have compared analytical modelled surface potential, electric field and drain current with simulated data of ATLAS TCAD tool.\",\"PeriodicalId\":243805,\"journal\":{\"name\":\"2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEMENTech48150.2019.8981284\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEMENTech48150.2019.8981284","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

在这里,我们报道了一种具有SiO2/ hfo2堆叠栅结构的n型SEL-BOX TFET。与SOI结构不同,SEL-BOX结构提供了低的断开状态电流,减少了自热效应。金属功函数的选择也使得从排水渠到通道的反向隧穿由于通道区域内形成屏障而受到限制。这不仅是高导通电流的结果,也是非常低的关断电流的结果,这提供了高离子/ off比。本文将分析模拟的表面电位、电场和漏极电流与ATLAS TCAD工具的模拟数据进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study and Investigation of DC and RF Performance of TFET on SEL-BOX and Conventional SOI TFET with SiO2/HfO2 Stacked Gate Structure
Here, we have reported an n-type SEL-BOX TFET with SiO2/HfO2Stacked Gate Structure. The SEL-BOX structure provides low off-state current and reduces self-heating effect unlike in SOI structure. The metal work function is also chosen such that the reverse tunnelling i.e. tunneling from drain to channel gets restricted due to formation of barrier within the channel region. This is not only result of high on-state current but also very low off-state current, which provides high ION/IOFFratio. Here we have compared analytical modelled surface potential, electric field and drain current with simulated data of ATLAS TCAD tool.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信