具有改进的互调和功率处理能力的单片晶体滤波器

M. D. Howard, R. Smythe, P. Morley
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These design trade-off's are discussed. filters in the frequency range 25 MHz to 125 MHz are Results on SCand BT-cut monolithic crystal presented. Data include measurements of conventional filter parameters as well as those relating to elastic non-linearities. Measurements of the motional and coupling parameters of SCand BT-cut two-pole monolithic devices are compared with theoretical predictions. Introduction Over the past decade or so advances in semiconductor technology have lead to the development of active devices with improved linearity and power handling capabilities. As active circuits have improved, the quartz crystal filter has become one of the limiting factors when low levels of third order intermodulation product (IM3) are required. In the past, improvements in IM3 generated in AT-cut quartz crystal filters have been achieved by improving processing techniques [ l ] and by the development of theory to assist in analyzing the anelastic properties of AT-cut quartz and its contribution to I M ~ generation [2,3,4], which in turn allows the optimization of design variables. However, the next generation of military H.F. radios is expected to demand even more stringent IM3 performance from crystal filters. Also, in order to improve exciter signal-tonoise ratios it is desirable to have as much signal amplification as possible before filtering. To achieve these objectives filters capable of handling higher power levels while still operating in a linear manner are needed. Concurrent with these pressing requirements are the demands of next generation instrumentation. As quieter, more linear measurement systems are required for the development of electronic warfare and global positioning systems the demands on spectrum clean-up filters l i k e wise become more stringent. Non-linearities in resonators can be considered as being of four types: 1) Non-linearity of effective series resistance, an effect which is often related to surface condition and surface contamination. This effect is largely process related and, providing units are fabricated in a similar manner and have similar surface motions, is expected to be similar for all cuts. The filter parameters most affected are out-of-band intermodulation performance, and variation in loss at low signal levels. 2 ) Non-linearity of motional parameters, an effect related to the anelastic properties of quartz and most apparent at high drive levels. Filter parameters most affected will be power handling capability and inband intermodulation products. This type of non-linearity will be dependent upon choice of cut and resonator design. 3 ) Thermal effects. Dissipated power is distributed norruniformly within the resonator in accordance with the squared amplitude of vibration, giving rise to thermal gradients which induce non-linear behavior. 4 ) Non-linear coupling to unwanted modes of vibration, which may affect both motional parameters and effective series resistance. While this effect is somewhat dependent on cut and is thought to be less prevalent in SC-cuts than in AT or BT it can often be eliminated by proper esonator design. Non-linear affects inband IM3 performance as well as filter coupling is most prevalent at high drive levels and amplitude and phase response. Non-linear resonance measurements suggested that the anelastic properties of SCand BT-cut quartz resonators might be superior to AT-cut; hence, in-band IM and power handling might be improved. Accordingly, a program to measure the relevant effective non-linear elastic constant for these cuts was instituted. Early results from that program are reported in a companion paper [5 ] . At he same time, asecond program, reported here, was undertaken to design and build SCand BT-cut monolithic filters and to measure their intermodulation characteristics and power handling capabilities. The Design of Coupled Resonator Structure on SCh BFCut Monolithic Dual Resonators Monolithic coupled resonator elements have r placed discrete resonators in most filter applications utilizing AT cuts. One of the major driving forces, along with economy and size, factors of prime concern to any user, is the effect of the hybrid coils required to construct filters using discrete resonators. These coils contribute excessive loss in the passband and will not give proper stopband attenuation unless manufactured with extreme care. In addition, especially at high impedance levels, there","PeriodicalId":291824,"journal":{"name":"39th Annual Symposium on Frequency Control","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Monolithic Crystal Filters Having Improved Intermodulation & Power Handling Capability\",\"authors\":\"M. D. Howard, R. Smythe, P. Morley\",\"doi\":\"10.1109/FREQ.1985.200890\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recent studies of elastic non-linearity in quartz resonators suggest that power handling capabilities and in-band intermodulation performance could be improved by using BTor SC-cut resonators in filter realization. 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To achieve these objectives filters capable of handling higher power levels while still operating in a linear manner are needed. Concurrent with these pressing requirements are the demands of next generation instrumentation. As quieter, more linear measurement systems are required for the development of electronic warfare and global positioning systems the demands on spectrum clean-up filters l i k e wise become more stringent. Non-linearities in resonators can be considered as being of four types: 1) Non-linearity of effective series resistance, an effect which is often related to surface condition and surface contamination. This effect is largely process related and, providing units are fabricated in a similar manner and have similar surface motions, is expected to be similar for all cuts. The filter parameters most affected are out-of-band intermodulation performance, and variation in loss at low signal levels. 2 ) Non-linearity of motional parameters, an effect related to the anelastic properties of quartz and most apparent at high drive levels. Filter parameters most affected will be power handling capability and inband intermodulation products. This type of non-linearity will be dependent upon choice of cut and resonator design. 3 ) Thermal effects. Dissipated power is distributed norruniformly within the resonator in accordance with the squared amplitude of vibration, giving rise to thermal gradients which induce non-linear behavior. 4 ) Non-linear coupling to unwanted modes of vibration, which may affect both motional parameters and effective series resistance. While this effect is somewhat dependent on cut and is thought to be less prevalent in SC-cuts than in AT or BT it can often be eliminated by proper esonator design. 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One of the major driving forces, along with economy and size, factors of prime concern to any user, is the effect of the hybrid coils required to construct filters using discrete resonators. These coils contribute excessive loss in the passband and will not give proper stopband attenuation unless manufactured with extreme care. 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引用次数: 3

摘要

最近对石英谐振器弹性非线性的研究表明,在滤波器实现中使用BTor SC-cut谐振器可以提高功率处理能力和带内互调性能。这些改进在频谱清理应用中具有潜在的优势,其中增加的功率处理能力可以提供更好的信噪比,以及在接收和发送励磁器特性受现有滤波器和调制性能限制的通信系统应用中。没有惩罚就得不到改进。阻抗水平、Co/C1比和频率随温度变化的增加会导致其他性能参数的下降。讨论了这些设计权衡。给出了频率范围为25 MHz至125 MHz的滤波器在单片晶片上的测试结果。数据包括常规滤波器参数的测量以及与弹性非线性有关的参数。对SCand BT-cut两极单片器件的运动参数和耦合参数的测量结果与理论预测结果进行了比较。在过去的十年里,半导体技术的进步导致了有源器件的发展,其线性度和功率处理能力得到了改善。随着有源电路的改进,石英晶体滤波器已成为要求低电平三阶互调积(IM3)的限制因素之一。在过去,通过改进处理技术[1]和通过发展理论来帮助分析at切割石英的非弹性特性及其对IM ~产生的贡献[2,3,4],从而实现了at切割石英晶体滤波器中产生的IM3的改进,这反过来又允许优化设计变量。然而,下一代军用高频无线电预计将要求晶体滤波器具有更严格的IM3性能。此外,为了提高激励器信噪比,在滤波前希望有尽可能多的信号放大。为了实现这些目标,需要能够处理更高功率水平的滤波器,同时仍以线性方式运行。与这些迫切需求同时出现的是下一代仪器仪表的需求。由于电子战和全球定位系统的发展需要更安静,更线性的测量系统,因此对频谱清理滤波器的要求变得更加严格。谐振器中的非线性可以分为四种类型:1)有效串联电阻的非线性,这种效应通常与表面状况和表面污染有关。这种影响很大程度上与工艺有关,如果单元以相似的方式制造并且具有相似的表面运动,则预计所有切割都是相似的。受影响最大的滤波器参数是带外互调性能和低信号电平下损耗的变化。2)运动参数的非线性,这种影响与石英的非弹性特性有关,在高驱动电平时最为明显。受影响最大的滤波器参数将是功率处理能力和带内互调产品。这种类型的非线性将取决于切割和谐振器设计的选择。3)热效应。耗散功率在谐振腔内按照振动振幅的平方向北均匀分布,产生热梯度,引起非线性行为。4)非线性耦合到不需要的振动模式,这可能会影响运动参数和有效串联电阻。虽然这种影响在一定程度上取决于切割,并且被认为在sc切割中不像在AT或BT中那么普遍,但通常可以通过适当的谐振器设计来消除。非线性影响带内IM3性能以及滤波器耦合在高驱动电平和振幅和相位响应中最为普遍。非线性共振测量表明,扫描和bt切割石英谐振器的非弹性性能可能优于at切割;因此,带内IM和功率处理可能会得到改善。据此,建立了测量这些切割的相关有效非线性弹性常数的程序。该项目的早期结果在一篇配套论文[5]中得到了报道。与此同时,第二个项目进行了设计和构建SCand BT-cut单片滤波器,并测量其互调特性和功率处理能力。单片双腔谐振器的耦合谐振器结构设计单片耦合谐振器元件在大多数使用AT切割的滤波器应用中都放置了离散谐振器。一个主要的驱动力,随着经济和规模,因素主要关注的任何用户,是混合线圈所需的效果,构建滤波器使用离散谐振器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Monolithic Crystal Filters Having Improved Intermodulation & Power Handling Capability
Recent studies of elastic non-linearity in quartz resonators suggest that power handling capabilities and in-band intermodulation performance could be improved by using BTor SC-cut resonators in filter realization. These improvements have potential advantages in spectrum cleanup applications, where increased power handling capability may offer better signal to noise ratios, and in communications system applications where receiver and transmitter exciter characteristics are limited by existing filter n ermodulation perf rmance. Improvements are not btained without penalty. Increases in impedance level, Co/C1 ratio and frequency change with temperature cause degradation of other performance parameters. These design trade-off's are discussed. filters in the frequency range 25 MHz to 125 MHz are Results on SCand BT-cut monolithic crystal presented. Data include measurements of conventional filter parameters as well as those relating to elastic non-linearities. Measurements of the motional and coupling parameters of SCand BT-cut two-pole monolithic devices are compared with theoretical predictions. Introduction Over the past decade or so advances in semiconductor technology have lead to the development of active devices with improved linearity and power handling capabilities. As active circuits have improved, the quartz crystal filter has become one of the limiting factors when low levels of third order intermodulation product (IM3) are required. In the past, improvements in IM3 generated in AT-cut quartz crystal filters have been achieved by improving processing techniques [ l ] and by the development of theory to assist in analyzing the anelastic properties of AT-cut quartz and its contribution to I M ~ generation [2,3,4], which in turn allows the optimization of design variables. However, the next generation of military H.F. radios is expected to demand even more stringent IM3 performance from crystal filters. Also, in order to improve exciter signal-tonoise ratios it is desirable to have as much signal amplification as possible before filtering. To achieve these objectives filters capable of handling higher power levels while still operating in a linear manner are needed. Concurrent with these pressing requirements are the demands of next generation instrumentation. As quieter, more linear measurement systems are required for the development of electronic warfare and global positioning systems the demands on spectrum clean-up filters l i k e wise become more stringent. Non-linearities in resonators can be considered as being of four types: 1) Non-linearity of effective series resistance, an effect which is often related to surface condition and surface contamination. This effect is largely process related and, providing units are fabricated in a similar manner and have similar surface motions, is expected to be similar for all cuts. The filter parameters most affected are out-of-band intermodulation performance, and variation in loss at low signal levels. 2 ) Non-linearity of motional parameters, an effect related to the anelastic properties of quartz and most apparent at high drive levels. Filter parameters most affected will be power handling capability and inband intermodulation products. This type of non-linearity will be dependent upon choice of cut and resonator design. 3 ) Thermal effects. Dissipated power is distributed norruniformly within the resonator in accordance with the squared amplitude of vibration, giving rise to thermal gradients which induce non-linear behavior. 4 ) Non-linear coupling to unwanted modes of vibration, which may affect both motional parameters and effective series resistance. While this effect is somewhat dependent on cut and is thought to be less prevalent in SC-cuts than in AT or BT it can often be eliminated by proper esonator design. Non-linear affects inband IM3 performance as well as filter coupling is most prevalent at high drive levels and amplitude and phase response. Non-linear resonance measurements suggested that the anelastic properties of SCand BT-cut quartz resonators might be superior to AT-cut; hence, in-band IM and power handling might be improved. Accordingly, a program to measure the relevant effective non-linear elastic constant for these cuts was instituted. Early results from that program are reported in a companion paper [5 ] . At he same time, asecond program, reported here, was undertaken to design and build SCand BT-cut monolithic filters and to measure their intermodulation characteristics and power handling capabilities. The Design of Coupled Resonator Structure on SCh BFCut Monolithic Dual Resonators Monolithic coupled resonator elements have r placed discrete resonators in most filter applications utilizing AT cuts. One of the major driving forces, along with economy and size, factors of prime concern to any user, is the effect of the hybrid coils required to construct filters using discrete resonators. These coils contribute excessive loss in the passband and will not give proper stopband attenuation unless manufactured with extreme care. In addition, especially at high impedance levels, there
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