一维微镜阵列的电场模型及单单元的机电仿真与优化

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2017-04-01 DOI:10.1109/EUROSIME.2017.7926268

D. Nguyen, N. Trinh, M. Lenczner, F. Zamkotsian, S. Cogan

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引用次数: 1

摘要

本文报道了静电驱动一维微镜阵列的建模与仿真的最新进展。我们介绍了通过单个电池的数值模拟得到的结果:拉入电压的分析和优化，以及当电压超过拉入电压时与基极接触的反射镜的反弹分析。对于该阵列，采用多尺度建模技术推导了静电场模型。详细介绍了该模型并给出了仿真结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A model of the electric field in a one-dimensional Micro-Mirror Array and electromechanical simulations and optimization in a single cell

This paper reports recent progress in modeling and simulation of a one-dimensional Micro-Mirror Array actuated by an electrostatic force. We present results obtained through numerical simulations of a single cell: the analysis and the optimization of the pull-in voltage and the analysis of the bounces of the mirror in contact with the base when it is subjected to a voltage exceeding the pull-in voltage. For the array, a model has been derived for the electrostatic field using a multi-scale modeling technique. The model is detailed together with simulation results.

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2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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