高灵敏度,柔性,基于短通道设备的力传感器

A. Mascia, A. Spanu, A. Bonfiglio, P. Cosseddu
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引用次数: 0

摘要

在这篇手稿中,我们报告了一种制造高灵敏度、柔性力传感器的新概念。所提出的器件已在柔性塑料衬底上制造,使用有机电荷调制场效应晶体管结构。基于晶体管的传感器的特点是浮栅与压电材料(即PVDF)耦合。这项工作的主要进展包括采用短通道OTFT,通过一种简单、可扩展和高度可重复的工艺制造,从而实现最终器件的更高灵敏度。这种方法对于所有需要高器件密度和高传感器灵敏度的应用都是有用的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Highly sensitive, flexible, force sensors based on short channel devices
In this manuscript we report about a novel concept for the fabrication of highly sensitive, flexible force sensors. The proposed devices have been fabricated on a flexible plastic substrates, using an Organic Charge Modulated Field Effect Transistor configuration. The transistor-based sensor is characterized by a floating gate coupled with a Piezoelectric material, namely PVDF. The main step forward in this work consists of the employment of short channel OTFT, fabricated by means of an easy, up-scalable and highly reproducible process, allowing to achieve a much higher sensitivity of the final device. Such an approach could be useful for all those applications in which high device density and high sensor sensitivity is required.
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