数字压力传感器阵列的设计考虑

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148871

R. Bower, M.S. Ismail

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引用次数: 4

摘要

介绍了一种采用晶圆键合技术设计的数字式压力传感器阵列。该阵列产生一个数字输出，描述0.25到1.0个大气压之间的压差范围。数字压力传感器的工作原理是在所需的压力点关闭电触点。

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Design considerations of a digital pressure sensor array

A digital pressure sensor array is described which is designed using aligned wafer bonding. The array produces a digital output describing the pressure differential range in the interval of 0.25 to 1.0 atmospheres of pressure. The digital pressure sensors operate on the principle of closing electrical contacts at desired pressure points.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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