高功率激光系统用纳米结构光学元件

2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Pub Date : 2009-07-01 DOI:10.1109/EDM.2009.5173937

V. Atuchin, I. Soldatenkov

{"title":"高功率激光系统用纳米结构光学元件","authors":"V. Atuchin, I. Soldatenkov","doi":"10.1109/EDM.2009.5173937","DOIUrl":null,"url":null,"abstract":"Different kinoform elements have been fabricated in fused silica by precise chemical etching. Kinoform phase relief have been made with an accuracy of ∼5 nm. A vortex kinoform mode converter which transforms a zero order Hermite-Gaussian laser mode to first order Laguerre-Gaussian mode with screw phase dislocation has been demonstrated. Conversion efficiency ≫90% for high power laser beams has been achieved in testing experiments.","PeriodicalId":262499,"journal":{"name":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","volume":"99 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanostructured kinoform optical elements for high power laser systems\",\"authors\":\"V. Atuchin, I. Soldatenkov\",\"doi\":\"10.1109/EDM.2009.5173937\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Different kinoform elements have been fabricated in fused silica by precise chemical etching. Kinoform phase relief have been made with an accuracy of ∼5 nm. A vortex kinoform mode converter which transforms a zero order Hermite-Gaussian laser mode to first order Laguerre-Gaussian mode with screw phase dislocation has been demonstrated. Conversion efficiency ≫90% for high power laser beams has been achieved in testing experiments.\",\"PeriodicalId\":262499,\"journal\":{\"name\":\"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices\",\"volume\":\"99 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDM.2009.5173937\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDM.2009.5173937","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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摘要

用精密化学刻蚀法在熔融二氧化硅中制备了不同的异型元素。Kinoform相位浮雕的精度为~ 5nm。研究了一种将零阶厄米-高斯激光模式转换为具有螺位错的一阶拉盖尔-高斯模式的涡旋型模变换器。高功率激光束的转换效率达到了90%以上。

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Nanostructured kinoform optical elements for high power laser systems

Different kinoform elements have been fabricated in fused silica by precise chemical etching. Kinoform phase relief have been made with an accuracy of ∼5 nm. A vortex kinoform mode converter which transforms a zero order Hermite-Gaussian laser mode to first order Laguerre-Gaussian mode with screw phase dislocation has been demonstrated. Conversion efficiency ≫90% for high power laser beams has been achieved in testing experiments.

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2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices

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