用两种光学探针测量方法对动态运行GTO的载流子分布进行了比较研究

Proceedings of the 2nd International Symposium on Power Semiconductor Devices and Ics. ISPSD '90. Pub Date : 1990-04-04 DOI:10.1109/ISPSD.1990.991091

H. Bleichner, M. Rosling, J. Vobecký, M. Lundqvist, E. Nordlander

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引用次数: 6

摘要

采用两种光学扫描技术测量功率器件中的局部载流子浓度。生成了二维载流子分布的三维图。仪器的时间分辨率便于测量设备运行的瞬态阶段。这些仪器非常适合于任何器件的表征，从简单的二极管到GTO:s，只要样品的几何形状小，并且制备得当。本研究比较了这些方法在检测原理、灵敏度和适用性方面的差异。

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A comparative study of the carrier distributions in dynamically operating GTO's by means of two optically probed measurement methods

Two optical scanning techniques are employed for the measurement of local carrier concentration in power devices. 3-D type maps of two-dimensional carrier distri- butions are produced. The time resolution of the instruments facilitates measurements of the transient phases of device operation. The instruments are well suited for the characte- rization of any device, ranging from simple diodes to GTO:s, provided that the samples are small in geometry, and properly prepar- ed. This investigation compares the methods as regards differences in detection principles, sensitivity, and applicability.

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Proceedings of the 2nd International Symposium on Power Semiconductor Devices and Ics. ISPSD '90.

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