单轴拉伸应变蓄能型栅极全能硅纳米线nmosfet

M. Najmzadeh, D. Bouvet, W. Grabinski, A. Ionescu
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引用次数: 4

摘要

本文报道了一种基于单轴拉伸应变的硅纳米线的积累模式(AM)栅极全能(GAA) nmosfet的实验研究。研究了它们在室温至~ 400 K范围内的电特性,提取并研究了载流子迁移率、平带和阈值电压。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Uniaxially tensile strained accumulation-mode gate-all-around Si nanowire nMOSFETs
In this work we report an experimental study on accumulation-mode (AM) gate-all-around (GAA) nMOSFETs based on silicon nanowires with uniaxial tensile strain. Their electrical characteristics are studied from room temperature up to ∼400 K and carrier mobility, flat-band and threshold voltages are extracted and investigated.
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