用于微系统元素的热和静电分析的快速场求解程序

1997 Proceedings of IEEE International Conference on Computer Aided Design (ICCAD) Pub Date : 1997-11-13 DOI:10.1109/ICCAD.1997.643612

V. Székely, M. Rencz

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引用次数: 7

摘要

为了解决微系统元件的快速热和静电模拟问题，在TUB开发了两种不同的现场求解工具。/spl mu/S-THERMANAL程序能够进行悬浮多层微系统结构的快速稳态和动态模拟，而2D-SUNRED程序是基于原始方法连续网络约简的通用现场求解程序的第一个版本。该程序为泊松方程的求解提供了一个非常快速和准确的FEM程序的替代品，例如在586 PC上求解32000网格问题约6分钟。应用程序示例展示了这些工具的可用性。

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Fast field solver programs for thermal and electrostatic analysis of microsystem elements

To solve the problem of fast thermal and electrostatic simulation of microsystem elements two different field solver tools have been developed at TUB. The /spl mu/S-THERMANAL program is capable for the fast steady state and dynamic simulation of suspended multilayered microsystem structures, while the 2D-SUNRED program is the first version of a general field solver program, based on an original method, successive network reduction. This program offers a very fast and accurate substitute for FEM programs for the solution of the Poisson equation, e.g. solving a 32000 grid problem in about 6 minutes on a 586 PC. Application examples show the usability of the tools.

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1997 Proceedings of IEEE International Conference on Computer Aided Design (ICCAD)

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