一种低成本的AFM设置，结合了干涉测量和FPGA

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2013-04-14 DOI:10.1109/EUROSIME.2013.6529935

R. Couturier, S. Domas, G. Goavec-Mérou, M. Favre, M. Lenczner, A. Meister

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引用次数: 1

摘要

原子力显微镜(AFM)提供高分辨率的表面图像。本文研究了准静态状态下悬臂梁阵列挠度估计的干涉测量方法。我们提出了一种新颖的基于最小二乘算法确定干涉条纹相位的完整解决方案及其优化的FPGA实现。仿真和实际试验结果显示了良好的效果，为悬臂阵列在动态状态下的实时估计和控制提供了新的思路。

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A cost effective AFM setup, combining interferometry and FPGA

Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus on an interferometry method for estimation of deflections in arrays of cantilever in quasi-static regime. We propose a novel complete solution with a least square based algorithm to determine interference fringe phases and its optimized FPGA implementation. Simulations and real tests show very good results and open perspectives for real-time estimation and control of cantilever arrays in the dynamic regime.

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来源期刊

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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