{"title":"用悬浮硅波导的静电变形建模光开关","authors":"K. Murray, L. Chrostowski","doi":"10.1109/OMN.2014.6924595","DOIUrl":null,"url":null,"abstract":"A low power electro-optic switch based on the electrostatic deformation of suspended silicon waveguides is proposed. Simulated results show complete switching of power with an applied voltage of 1.2 V for a 270 μm long directional coupler switch. The device footprint is less than 270 μm × 10 μm.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Modeling optical switching by electrostatic deformaion of suspended silion waveguides\",\"authors\":\"K. Murray, L. Chrostowski\",\"doi\":\"10.1109/OMN.2014.6924595\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A low power electro-optic switch based on the electrostatic deformation of suspended silicon waveguides is proposed. Simulated results show complete switching of power with an applied voltage of 1.2 V for a 270 μm long directional coupler switch. The device footprint is less than 270 μm × 10 μm.\",\"PeriodicalId\":161791,\"journal\":{\"name\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2014.6924595\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924595","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Modeling optical switching by electrostatic deformaion of suspended silion waveguides
A low power electro-optic switch based on the electrostatic deformation of suspended silicon waveguides is proposed. Simulated results show complete switching of power with an applied voltage of 1.2 V for a 270 μm long directional coupler switch. The device footprint is less than 270 μm × 10 μm.
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