半导体晶圆制造环境下WIPLOAD控制变化的实验研究

A. I. Sivakumar, Chao Qi, Andy Darwin Kasan Hidayat
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引用次数: 6

摘要

WIPLOAD控制被认为是一种有效的作业释放控制方法。本文对半导体晶圆厂环境下的两种WIPLOAD控制方式进行了进一步的仿真实验研究。第一种变化机制是在可以控制下一个要释放的作业类型的情况下,在指定的级别上对每个部件类型单独控制WIPLOAD。第二个变化是在生产线上附加释放控制点的机制。在半导体制造环境中,将WIPLOAD变化的性能与原始的WIPLOAD Control和其他现有的释放方法(包括CONWIP和Constant release)进行了比较。实验结果表明,通过将整个晶圆厂的WIPLOAD控制分解为对每个零件类型的WIPLOAD水平的控制,可以提高周期时间性能,特别是在周期时间的标准差方面。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental study on variations of WIPLOAD Control in semiconductor wafer fabrication environment
WIPLOAD Control has been proposed and evaluated as an effective job release control methodology. This paper presents a further simulation experimental study on two variations of WIPLOAD Control in semiconductor wafer fab environment. The first variation mechanism is to control separate WIPLOAD for each part type at a specified level under the situation when the type of job going to be released next can be controlled. The second variation is a mechanism with additional release control points along the production line. The performance of the WIPLOAD variations are compared with that of the original WIPLOAD Control and other existing release methods including CONWIP and Constant release in semiconductor manufacturing environment. The experimental results indicate that by breaking down the control of overall fab WIPLOAD into controlling WIPLOAD level for each part type, cycle time performance can be improved especially with respect to the standard deviation of cycle time.
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