用FIB技术探索光电子学的前沿

A. Steckl
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引用次数: 4

摘要

综述了FIB技术在光电器件和电路制造中的当前和潜在的未来应用。简要介绍了无掩模和无抵抗FIB的优点。本文讨论了一种完全由FIB(光栅和通道波导)制造的DBR激光器,作为FIB制造光电元件的一个例子。展望了FIB技术在光通信光电子领域应用的机遇和挑战。在这种应用中,WDM激光源、加/降滤波器、波导和合成器等元件可以理想地通过FIB在集成光电电路中制造。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Exploring the frontiers of optoelectronics with FIB technology
A review of the current and potential future uses of FIB technology for the fabrication of optoelectronic devices and circuits is presented. The advantages of the maskless and resistless FIB fabrication are briefly reviewed. A DBR laser totally fabricated by FIB (both gratings and channel waveguide) is discussed as an example of FIB-fabricated optoelectronic components. The opportunities and challenges of future applications of FIB technology in fiber-optic communications optoelectronics are considered. In this application, components such as WDM laser sources, add/drop filters, waveguides, and combiners can be ideally fabricated in an integrated optoelectronic circuit by FIB.
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