{"title":"用FIB技术探索光电子学的前沿","authors":"A. Steckl","doi":"10.1109/WOFE.1997.621143","DOIUrl":null,"url":null,"abstract":"A review of the current and potential future uses of FIB technology for the fabrication of optoelectronic devices and circuits is presented. The advantages of the maskless and resistless FIB fabrication are briefly reviewed. A DBR laser totally fabricated by FIB (both gratings and channel waveguide) is discussed as an example of FIB-fabricated optoelectronic components. The opportunities and challenges of future applications of FIB technology in fiber-optic communications optoelectronics are considered. In this application, components such as WDM laser sources, add/drop filters, waveguides, and combiners can be ideally fabricated in an integrated optoelectronic circuit by FIB.","PeriodicalId":119712,"journal":{"name":"1997 Advanced Workshop on Frontiers in Electronics, WOFE '97 Proceedings","volume":"411 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-01-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Exploring the frontiers of optoelectronics with FIB technology\",\"authors\":\"A. Steckl\",\"doi\":\"10.1109/WOFE.1997.621143\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A review of the current and potential future uses of FIB technology for the fabrication of optoelectronic devices and circuits is presented. The advantages of the maskless and resistless FIB fabrication are briefly reviewed. A DBR laser totally fabricated by FIB (both gratings and channel waveguide) is discussed as an example of FIB-fabricated optoelectronic components. The opportunities and challenges of future applications of FIB technology in fiber-optic communications optoelectronics are considered. In this application, components such as WDM laser sources, add/drop filters, waveguides, and combiners can be ideally fabricated in an integrated optoelectronic circuit by FIB.\",\"PeriodicalId\":119712,\"journal\":{\"name\":\"1997 Advanced Workshop on Frontiers in Electronics, WOFE '97 Proceedings\",\"volume\":\"411 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-01-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 Advanced Workshop on Frontiers in Electronics, WOFE '97 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/WOFE.1997.621143\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 Advanced Workshop on Frontiers in Electronics, WOFE '97 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WOFE.1997.621143","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Exploring the frontiers of optoelectronics with FIB technology
A review of the current and potential future uses of FIB technology for the fabrication of optoelectronic devices and circuits is presented. The advantages of the maskless and resistless FIB fabrication are briefly reviewed. A DBR laser totally fabricated by FIB (both gratings and channel waveguide) is discussed as an example of FIB-fabricated optoelectronic components. The opportunities and challenges of future applications of FIB technology in fiber-optic communications optoelectronics are considered. In this application, components such as WDM laser sources, add/drop filters, waveguides, and combiners can be ideally fabricated in an integrated optoelectronic circuit by FIB.